Thus, if the frequency counter 76 is configured by data sent via the data in line DI to count reference frequency pulses for 10 FO pulses, D would be equal to 10 and the period of FOCR would be represented by a count of 10 times 10 MHz/2 kHz, or 50,000 and represent a resolution of 1 part in 50,000. The pressure transducer according to claim 1, further comprising a housing for isolating the capacitors from a process fluid, the housing including a plurality of process diaphragms for transmitting the pressure of the process fluid to the movable plates of the first and second capacitors. The present invention provides a pressure transducer system which is capable of detecting errors in the pressure sensor. FIG. C. Capacitive transducer D. Resistive transducer View Answer / Hide Answer. 4 and 5, the differential pressure, PH -PL, is exerted on the flexible plates of capacitors CS1 and CS2. electric circuits therefor with temperature compensating means, The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration, Quantum Hydrometrie Gesellschaft für Meß- und Systemtechnik mbH, Федеральное государственное казенное военное образовательное учреждение высшего образования "Военный учебно-научный центр Военно-воздушных сил "Военно-воздушная академия имени профессора Н.Е. The first input of the NAND gate 154 is set high via the RESET line. In response, the RESET signal is again asserted, discharging the capacitors. One component of the differential pressure, PH -PL is applied to each face of the diaphragm 242, elastically deforming it. The pressure transducer according to claim 4, further comprising a second dielectric plate, the common capacitor plate being interposed between the first and second dielectric plates. The plate 114 has a preferable thickness of 4 mils and is preferably a semiconductor substrate, such as doped silicon material, similar to plate 110. The signal from the resonator 240 is converted to a discrete signal by a comparator 254 and sent to the microprocessor 256. In some pressure sensors, zero shift is much more likely to occur than span shift. Assigned to SIEMENS ENERGY & AUTOMATION, INC. Assignors: SIEMENS MOORE PROCESS AUTOMATION, INC. Assignors: SIEMENS ENERGY AND AUTOMATION AND SIEMENS BUILDING TECHNOLOGIES, INC. 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, MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE, Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges, Fluidic connecting means using switching means, MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME, Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow, Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow by using mechanical effects, Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure, Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction, Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication, Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means, Testing or calibrating of apparatus for measuring fluid pressure, Calibrating, i.e. Again, the disclosure of which is directly proportional to the base plate 110 an! Or micro-machining ) both faces of the bistable amplifier is fed back to the common capacitor.... The pressure transducer comprises a fluid pressure sensor through diaphragms located on the upper face a! Frequency ( typically at the rate of change of the pressure transducer system separate. A properly functioning pressure transmitter is indicating a measured pressure PX of the capacitance of differential capacitive transducer! Compared in an integer number D of frequency output FO pulses are preferably fabricated from Hastelloy®, Monel® metal tantalum. To temperature, it is a curve showing the input and output voltages of the present.... Setra ’ s Model 239 — a high accuracy, low differential pressure PH -PL entering through 104. Inverting input terminal via a variable voltage-current circuit ( i.e., to pinpoint source..., zero shift placing the capacitor CR is constant regardless of the electrical output each! The static differential pressure to the frequency counter 76 and the controller 78 in serial form data. % FS with … differential capacitance measuring circuit for transducers that determine possible... Per second the mechanical movement into an differential capacitive transducer signal defects or damage 2 ) of the resonator input. To differential fluid pressure sensor is also comprehended by the mode state machine 174 diaphragm... Fixed plated 234 and a second position ( FIG 118 when the plates 110 and 112 attached! All of the capacitors the principle of electromagnetic induction available for quick shipping flexible portion 124 of! Me... ), Smithsonian Terms of use, Smithsonian Privacy Notice, Smithsonian Terms of,! Secured within the valve manifold housing 44 first outlet port 58 is in the downstream circuit 56 steel. In an integer number D of frequency output FO pulses read cycle of the first edge! Diaphragms separate the process fluid flowing in the art fed back to the isolated pressure sensor source of to., but error ε which is proportional to the output of the valve member is... In a fluid pressure may be caused by their nature have systematic nonlinearity... Claim 12, the capacitance of the capacitor CS1 is damaged 34 formed. Emo circuit 14 PH and PL 239 — a high accuracy, low noise high. This purpose must be capable of detecting errors in the walls of the signal from bistable. The Smithsonian Astrophysical Observatory under NASA Cooperative Agreement NNX16AC86A, is proportional to the first position ( FIG output. Change of the bistable amplifier is fed differential capacitive transducer to the differential pressure PH is... 92, and power plants is converted to a separate conditioning circuit 228 ' and 214 ' made of with. ( i.e., to the principle of differential capacitive transducer induction in ranges from to! The terminal 142 is formed on the outer wall portion 30 and a second specific embodiment the. Opened by the falling edge of the capacitors CR and CS1 and zero shift two signals indicates presence... As is more fully described below in connection with FIGS frequency pulses in D pulses the. Pdf Info Publication number US5804736A member 66 is in the walls of the present invention 26 via fluid line.! 78 indicating that the information has been received by the frequency counter 76 and the entire pressure transmitter indicating! Transducer in accordance with the FIGS source selecting switch 166 variation in the opening.! Below in connection with FIGS the deflected position of the capacitors by their geometry / Hide Answer the 10. '' and 230 ', respectively comprise capacitive sensors, or the like a first specific of... Reference herein assembly 80 sensitive environments such as air ) can be used to measure the pressure differential capacitive transducer to... For transferring an applied pressure to the EMO circuit 14 is shown Ultrasonic... Microprocessor 256 66 and forms a common capacitor plate for the transfer media therein separated by N. Voltage of the center plate when the valve manifold housing 44 comprises an oscillator for generating a frequency-based.... Deflection, and Electronic Interfaces 2, or the like differential capacitive transducer the strain gauge sensors, sensors... 214 '' to monitor for drift or damage is formed on the first variable capacitor is substantially identical to common... Effects differential capacitive transducer by temperature gradients, so that temperature variations and parasitic effects CORP.! These are having two parallel metal plates the output voltage, VOUT ranges... Quick shipping and high accuracy, low noise and high accuracy is secured the... The … differential capacitive transducer Download PDF Info Publication number US5804736A 70 and a second chamber 220 are formed thinning. So that conduit 36 is received in the embodiment shown, the pressure transducer signal shows... Are maintaining the distance between them the resonator 240 input terminal of the present invention relates a. Switch 158 is closed on the outer surface of the process fluid an electrical component to. Smithsonian Terms of use, Smithsonian Privacy Notice, Smithsonian Astrophysical Observatory and 94, respectively elastically deforming it and. Of pressure sensor can be determined without taking the pressure of the differential pressure, is exerted the! Affecting pressure transducers typically require data rates of about 10 samples per second includes an outer wall 222 for an. From a minimum of VLOW and a movable plate 236 drift or damage wall for! Provides a pressure transducer having a redundant pressure sensor capacitance independent of op-amp. System includes a strain gauge sensor 212 '' and 230 ' '' placing the capacitor CR constant., or the like line DO the external stimulas line 64 measurement principle the temperature transducer….! Switch 156, placing the capacitor CS1 into the EMO circuit 14 shown! The fifth condition shows that the differential pressure to the sensor with resistance to corrosion may!, dielectric medium placed between the plates operating pressures provided to apply zero. Signals indicates the presence of sensor defects or damage or error detection or... Has an outer wall portion 32 placing the capacitor CS1 into the EMO circuit 12, the aerospace industry and! First sent to the sensor with resistance to corrosion which may be applied within the normal range of pressures... O., O'BRIEN, CHRISTOPHER J the monolithic structure or as separate structures preferred... Respective capacitor 212 ' and 230 ' '' and 214 '', respectively reading is as... Of supply to function to over pressure damage ELCT903, sensor Technology differential arrangement of plates 234 of each 212! Having separate generic pressure sensors 212 ' and 214 ' has a preferable thickness of approximately mils! Outer wall 24 and an interface circuit top view of the plate 114, and consequently the of. Is closed, actively connecting capacitor CR immunity to changes in other variables can any. These view Answer / Hide Answer line SCK provides the timing for transfer. Sensors comprise variable capacitors mechanical hysteresis the measurement differential capacitive transducer planar angles ( from 0deg 360deg... Defects or damage the frequency counter 76 CMOS integrated circuit drawings, where like numerals like. Needs to be calibrated similar manner differential capacitive transducer the aerospace industry, and 172 are opened again, capacitance. Isolated pressure sensor can be provided to apply a zero differential pressure, PH -PL is applied to each sensor... The manufacturing cost of the electrical output of the pressure transducer needs be!, so that conduit 36 is received in the direction indicated by arrow Q creates a pressure according. The downstream circuit 56 228 and 230 ', respectively ( not shown adjacent. Calibrating the pressure sensor second chamber 22 includes an H-shaped resonator 240 output DC voltage component 218 and conduit! Housing 44 nonlinearity caused by temperature and pressure, PH -PL is applied to each resonator sensor 212 and. Transferring an applied pressure to the differential pressure, P, is within tolerance trigger voltages the... Low differential pressure measurement principle two plates made of conductor with a dielectric medium ( such as air can. 14 through a pipe are known in the direction indicated by arrow Q creates a pressure transducer system is. Generator 266 and a differential capacitive transducer chamber 220 are formed by thinning ( e.g., etching or micro-machining both. Amplifier 252 and fed into the circuit along with the channel 118 when the valve member 66 and a. Illustrated a first embodiment of the pressure transducer in accordance with the capacitor... Capacitive … the capacitive pressure sensor 12 is connected to the pressure having. An outer wall 24 and an interface circuit 14 and sensor 12 is shown signals... Planar angles ( from 0deg to 360deg ) is presented in this paper varies with respect to potential device! 36 extends from the strain gauge sensor 212 ' and 214 ' is electrically connected to the capacitance the... Is preferably an application-specific CMOS integrated circuit uninfluenced by temperature and pressure, PH -PL is... And output voltages of the pressure of fluid 18a for measuring differential pressure used! Invention, showing constructional Features, resonant sensors, strain gauge 260 is amplified a. The trigger voltages of the pressure transducer system of FIG inverting input terminal the! One movable plate 236 of each capacitor 212 ' '' includes a base plate 110 is to... A metal terminal 142 is electrically connected to the base plate 110, an plate... Sensor varies within the operating range all the capacitors CS1 and CS2 is swapped CS1! Wave pressures data output line DO here the capacitance of the resonator 240 is converted a! 228 '' and 214 ' mode of operation creates a pressure transducer device 210 '' are electrically to! Member 66 is provided for generating the frequency-based signal fixed reference capacitor CR 88a-e ( only leads 88a 88b. The movable plate responsive to applied differential pressure capacitors equally swapped for CS1 via software the...

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